Colored X-ray spectroscopy dedicated to ultrathin inorganic materials H/F

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The characterization of nanometric layers developed for advanced CMOS devices (gate-metal stack) and other innovative materials (transition metal dichalcogenides) is based in particular on state-of-the-art X-ray spectroscopy equipments (fluorescence, photoemission). Such tools combine multi-energy excitation and angle-resolved analysis to optimize sensitivity to ultrathin materials. The objective of the internship is the development of quantitative analysis protocols by multi-energy angular analysis. The work required: will be carried out in a multidisciplinary international context (interaction with the characterization and process teams, collaboration with a Japanese equipment manufacturer) will be balanced between experience (50%) and simulation (50%) This 6-month internship will mainly focus on fluorescence analysis. It may be followed by a PhD contract which will extend the field of interest to the combination multi-energy and angle-resolved X-ray photoemission and fluorescence analyses. References : - Faraday Discuss., 2022,236, 288-310, doi.org/10.1039/D1FD00110H - Applied Surface Science, 2021, 536, 147703, doi.org/10.1016/j.apsusc.2020.147703 - inline XRF tool featuring multi-energy and angular resolution capability : https://youtu.be/JzMmTNYbCAg?si=xw9KoFP5-euEK3vJ

Bac+5 - Master of Science

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